Ultralow-voltage Boron-Doped diamond field emitter vacuum diode

IEEE Electron Device Letters

Volumn 19, Issue 10, 1998, Pages 379-381

  Kang, W P ^a   Wisitsora at, A ^a   Davidson, J L ^a,b   Kerns, D V ^a,b  

^a VANDERBILT UNIVERSITY   (United States)

^b IEEE

Author keywords

CVD; Diomand materials; Electron emission; Vacumm doiode

Indexed keywords

ANODES; BORON; CHEMICAL VAPOR DEPOSITION; ELECTRIC CURRENTS; ELECTRON EMISSION; SEMICONDUCTING DIAMONDS; SEMICONDUCTOR DOPING; THERMOELECTRICITY; VACUUM APPLICATIONS;

ELECTROSTATIC BONDING; FIELD EMITTER VACUUM DIODES; VACUUM THERMAL ELECTRIC (VTE) TREATMENT;

SEMICONDUCTOR DIODES;

EID: 0032187676     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/55.720192     Document Type: Article

References (20)

1. C. A. Spindt, "A thin field emission cathode," J. Appl. Phys. vol. 39, p. 3504, 1968.
2. I. Brodie, "Physical considerration in vacuum micorelectronics device s," IEEE Trans. Election Devices, vol. 36, p. 2641, Nov. 1989.
3. C. A. Spindt, C. E. Holland, A. Rosengreen and I. Brodie, "Field emitter arrays for vacuum microelectronics, "IEEE Trans. Electron Devices, vol. 38, p. 2355, Oct. 1991.
4. E. A. Adler, Z. Bardai, R. Forman, D. M. Goebel, R. T. Longo, and M. Sockolich, "Demonstration of low voltage field emission," IEEE Trans. Electron Devices, vol. 38, p. 2304, Oct. 1991.
5. C. E. Hunt, J. T. Trujillo, and W. J. Orvis, "Structure and electrical characteristic of silicon field emission microelectronic devices," IEEE Trans. Electron Devices, vol. 38, p. 2309, Oct. 1991.
6. Q. Li, W. P. Kang, M.Y. Yuan, J. F. Xu, D. Zhang, and J. L. Wu, "Fabrication and characterization of silicon field emission diodes and triodes," J. Vac. Sci. Technol. B. vol. 12, no. 2, p. 676, 1994.
7. ++ junction as a micro-vacum triode," J. Vac. Sci. Technol. B, vol. 12, no. 5, p. 1, 1994.
8. S. J. Lee, S. N. Lee, S. W. Lee, and D. Jeon, "Self-aligend silicon tips coated with diamond-like carbon," J. Vac. Sci. Technol. B. vol. 15, no. 2, p 457, 1997.
9. T. Hirano, S. Kanemaru, and J. Itoh, "A MOSFET-structured Si tip for stable emission current," in IEDM Tech. Dig., Dec. 8-11, 1996, San Francisco, CA.
10. _, "Enhancement of electron emission efficieecy and stability of molybdenum field emitter array by diamond-like carbon coating," in IEDM'96 Tech. Dig., Dec. 8-11, 1996, San Francisco, CA.
11. R. J. Nemanich, P. K. Baumunn, and J. Van der Weide, "Dimond negative electron affinty surfaces, structures and devices," in Proc. Appl. Diamond Conf., 1995, vol. 1, p. 17.
12. C. Bandis and B. B. Pate, "Photoelectric emisson form negativeelectron-affinity diamond (111) surfaces: Exciton breakup versus conduction band," Phys. Rev. B. vol. 52, no. 16, p, 12056, 1995.
13. V. V. Zhirnov, E. I. Givargizov, and P. S. Plekanov, "Field emission from silicon spike with diamond coating," J. Vac. Sci. Technol. B, vol. 13, no. 2, p 418, 1995.
14. E. I. Givargizov, "Silicon tips with diamond particle on them: New field emitters?," J. Vac. Sci. Technol. B, vol. 13, no. 2, p. 414, 1995.
15. J. Liu, V. V. Zhirnov, G. J. Wojak, A. F. Myers, W. B. Choi, J. J. Hren, S. D. Wolter, M. T. McClure, B. R. Stoner, and J. T. Glass, "Electron emission from diamond coated silicon field eminer," Appl. Phys. Lett., vol. 65, no. 22, p. 2842, 1994.
16. E. I. Givargizov, E. V. Rakova, V. V. Zhirnov, L. L. Aksenova, and D. M. Zverev, "Growth of diamond particles on nanometer-size silicon tips," Phys. Dokl., vol. 39, no. 11, p. 766, 1994.
17. T. Asano, Y. Oobuchi, and S. Katsumat, "Field emission from ionmilled diamond films on Si," J. Vac. Sci. Technol. B, vol. 13, no. 2, p. 431, 1995.
18. W. P. Kang, J. L. Davidson, M. A. George, J. Wittig, I. Milosevlijevic, Q. Li, J. F. Xu, and D. V. Kerns, "Physical characterization of diamond pyramidal microtip emitters," J. Vac. Sci. Technol. B, vol. 15, no. 2, p. 460, 1997.
19. W. P. Kang, J. L. Davidson, M. Howell, B. Bhuva, D. L. Kinser, D. V. Kern, Q. Li, and J. F. Xu, "Micro-patterned polycrystalline diamond field emitters vacuum diode arrays," J. Vac. Sci. Technol. B, vol. 14, no. 3. p. 2068, 1996.
20. 2 contents and surface treatment on the field emission of micropatterned pyramidal diamond tips," in IVMC'97 Tech. Dig., Kyongju, Korea, Aug. 17-21, 1997, p. 107.