Piezoactuator-integrated monolithic microstage with six degrees of freedom

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 2, Issue , 2003, Pages 1518-1521

  Zhang, De Yuan ^a   Ono, T ^b   Esashi, M ^b  

^a BEIHANG UNIVERSITY   (China)

^b TOHOKU UNIVERSITY   (Japan)

Author keywords

Arm; Electrodes; Electrostatics; Insulation; Machining; Metalworking machines; Optical device fabrication; Piezoelectric actuators; Polyimides; Testing

Indexed keywords

ACTUATORS; DEGREES OF FREEDOM (MECHANICS); ELECTRIC ARC WELDING; ELECTRODES; ELECTROPLATING; ELECTROSTATIC ACTUATORS; ELECTROSTATICS; FABRICATION; INSULATION; LIGHT SENSITIVE MATERIALS; MACHINING; MECHANICS; MICROSYSTEMS; PIEZOELECTRICITY; PLATE METAL; PLATES (STRUCTURAL COMPONENTS); POLYIMIDES; SOLID-STATE SENSORS; TESTING; TRANSDUCERS;

ARM; FABRICATION METHOD; METAL ELECTROPLATING; MICRO-FABRICATION TECHNIQUES; OPTICAL DEVICE FABRICATION; PHOTO-SENSITIVE POLYIMIDE; PIEZO STACK ACTUATOR; SIX DEGREES OF FREEDOM;

PIEZOELECTRIC ACTUATORS;

EID: 84944751085     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1217066     Document Type: Conference Paper

References (7)

1. D. W. Lee, T. Ono, T. Abe, and M. Esashi, Microprobe Array With Electrical Interconnection for Thermal Imaging and Data Storage, J. Microelectromech, Systems, 11(2002), pp.215-221.
2. http://csns.snu.ac.kr/
3. http://www.maschinenbau.tu-ilmenau.de/mb/wwwmm/aindex-e.htm/
4. J. J. Choi, H. Park, K. Y. Kim and J. U. Jeon, Electromagnetic Micro X-Y Stage with Very Thick Cu Coil for Probe-Based Mass Data Storage Device, Proceedings of SPIE, 4334(2001), pp. 363-371.
5. Z. L. Zhang and N. C. Macdonald, Compound Stage MEM Actuator Suspended for Multidimensional Motion, United States Patent, No. 5,536,988, Jul. 16, 1996.
6. G. Suzuki and M. Esashi, Planer Fabrication Multilayer Piezoelectric Actuator by Groove Cutting and Electroplating, Proc. of the 13th IEEE MEMS'2000, Technical Digest, Miyazaki, Japan, Jan. 23-27, 2000, p.46-51.
7. D. Y. Zhang, T. Ono and M. Esashi, A Piezodriven XY-Microstage for Multiprobe Nanorecording, Pacific Rim Workshop on Transducers and Micro/Nano Technologies'02, Xiamen, China, July 22-24, 2002, p.449-452.