Monolithic CMOS multi-transducer gas sensor microsystem

Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05

Volumn 2, Issue , 2005, Pages 1142-1145

  Li, Y ^a   Vancura, C ^a   Barrettino, D ^b   Graf, M ^a   Hagleitner, C ^c   Kummer, A ^a   Zimmermann, M ^a   Kirstein, K U ^a   Hierlemann, A ^a  

^a ETH ZURICH   (Switzerland)

^b UNIVERSITY OF WASHINGTON   (United States)

^c IBM RESEARCH ZURICH   (Switzerland)

Author keywords

CMOS; Gas sensor; Multi transducer

Indexed keywords

CHEMICAL SENSORS; ELECTRONIC EQUIPMENT; GASES; INTERFACES (COMPUTER); MICROMACHINING; POLYMERS; SIGNAL PROCESSING; TRANSDUCERS;

COMMUNICATION INTERFACE; MICROSYSTEMS; PACKAGING EFFORTS; SENSOR ARRAYS;

CMOS INTEGRATED CIRCUITS;

EID: 27544468438     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

1. A. Hierlemann, O. Brand, C. Hagleitner, and H. Baltes, "Microfabrication Techniques for Chemical/Biosensors", IEEE Proceedings, Vol. 91, NO. 6, pp. 839 -863, June, 2003
2. A.Hierlemann, M. Schweizer-Berberich, U. Weimar, G. Kraus, A. Pfau and W. Gopel, "Patten Recognition and Multicomponent Analysis", Sensors Update, Vol. 2, VCH, pp.119-180, 1996
3. D. lange, C. Hagleitner, C. Herzog, O.Brand, and H. Baltes, "Electromagnetic Actuation and MOS-transistor Sensing for CMOS-integrated Micromechanical Resonators", S&A A 103, 2003, pp.150-155.
4. A. Kummer, A. Hierlemann and H. Baltes, "Tuning Sensitivity and Selectivity of Complementary Metal Oxide Semiconductor-based Capacitive Chemical Microsensors", Analytical Chemistry 76 (2004) pp.2470 - 2477.
5. M. Graf, D. Barrettino, S. Taschini, C. Hagleitner, A. Hierlemann, and H. Baltes, "Metal-Oxide-Based Monolithic Complementary Metal Oxide Semiconductor Gas Sensor Microsystem", Analytical Chemistry 76 (2004), pp.4437 - 4445.
6. C. Hagleitner, CMOS single-chip Gas Detection System Comprising Capacitive, Calorimetric and Mass-Sensitive Microsensors", Ph.D. thesis ETH Zürich Nr. 14511, 2002.