Design of a micromachined CMOS compass

Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05

Volumn 1, Issue , 2005, Pages 405-408

  Dumas, N ^a   Latorre, L ^a   Nouet, P ^a  

^a LIRMM   (France)

Author keywords

Compass; MEMS design; Monolithic

Indexed keywords

LORENZ FORCE; MEMS DESIGN; MICRO-COMPASS; MONOLITHIC;

COMPUTER SIMULATION; ELECTRIC POWER UTILIZATION; MICROMACHINING; NOISE ABATEMENT; THERMAL EFFECTS;

CMOS INTEGRATED CIRCUITS;

EID: 27544450335     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2005.1496441     Document Type: Conference Paper

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