Integrated chemical microsensor systems in CMOS-technology

Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05

Volumn 2, Issue , 2005, Pages 1134-1137

  Hierlemann, Andreas ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; CONCENTRATION (PROCESS); COSTS; MARKETING; MICROELECTROMECHANICAL DEVICES; TECHNOLOGY TRANSFER; TRANSDUCERS;

MICROSENSOR SYSTEM; MULTI-SENSOR ARRAYS; OPTIMUM TRANSDUCERS; TARGET ANALYTES;

CHEMICAL SENSORS;

EID: 27544448738     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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