Film transfer and bonding technique to cover Lab on a Chip

Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05

Volumn 1, Issue , 2005, Pages 940-943

  Kwon, Jae Wan ^a   Kamal Bahl, Sanat ^a   Kim, Eun Sok ^a  

^a University of Southern California   (United States)

Author keywords

Capillary flow; Film Transfer; Room temperature bonding

Indexed keywords

FILM TRANSFER; MICROFLUIDIC SYSTEMS; ROOM TEMPERATURE BONDING; SILICON CHIP;

BONDING; CAPILLARY FLOW; FLUID DYNAMICS; SURFACE TENSION; TEMPERATURE DISTRIBUTION; THIN FILMS;

MICROPROCESSOR CHIPS;

EID: 27544444627     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

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