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Volumn 1, Issue , 2003, Pages 170-173
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Highly c-axis-oriented AlN film using MOCVD for 5GHz-band FBAR filter
a
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Author keywords
[No Author keywords available]
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Indexed keywords
ACOUSTIC SURFACE WAVE FILTERS;
ALUMINUM NITRIDE;
BANDPASS FILTERS;
METALLORGANIC CHEMICAL VAPOR DEPOSITION;
MONOLITHIC MICROWAVE INTEGRATED CIRCUITS;
ORTHOGONAL FREQUENCY DIVISION MULTIPLEXING;
POLYCRYSTALLINE MATERIALS;
RADIO FREQUENCY AMPLIFIERS;
TRANSDUCERS;
WIRELESS TELECOMMUNICATION SYSTEMS;
ELECTROMECHANICAL COUPLING;
FILM BULK ACOUSTIC RESONATORS (FBAR);
INTERDIGITAL TRANSDUCERS (IDT);
WIRELESS LOCAL AREA NETWORK (WLAN);
LOCAL AREA NETWORKS;
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EID: 4143072680
PISSN: 10510117
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (31)
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References (4)
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