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Volumn 1, Issue , 2003, Pages 170-173

Highly c-axis-oriented AlN film using MOCVD for 5GHz-band FBAR filter

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC SURFACE WAVE FILTERS; ALUMINUM NITRIDE; BANDPASS FILTERS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; MONOLITHIC MICROWAVE INTEGRATED CIRCUITS; ORTHOGONAL FREQUENCY DIVISION MULTIPLEXING; POLYCRYSTALLINE MATERIALS; RADIO FREQUENCY AMPLIFIERS; TRANSDUCERS; WIRELESS TELECOMMUNICATION SYSTEMS;

EID: 4143072680     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (31)

References (4)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.