Highly c-axis-oriented AlN film using MOCVD for 5GHz-band FBAR filter

Proceedings of the IEEE Ultrasonics Symposium

Volumn 1, Issue , 2003, Pages 170-173

  Yang, C M ^a   Uehara, K ^a   Kim, S K ^a   Kameda, S ^a   Nakase, H ^a   Tsubouchi, K ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC SURFACE WAVE FILTERS; ALUMINUM NITRIDE; BANDPASS FILTERS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; MONOLITHIC MICROWAVE INTEGRATED CIRCUITS; ORTHOGONAL FREQUENCY DIVISION MULTIPLEXING; POLYCRYSTALLINE MATERIALS; RADIO FREQUENCY AMPLIFIERS; TRANSDUCERS; WIRELESS TELECOMMUNICATION SYSTEMS;

ELECTROMECHANICAL COUPLING; FILM BULK ACOUSTIC RESONATORS (FBAR); INTERDIGITAL TRANSDUCERS (IDT); WIRELESS LOCAL AREA NETWORK (WLAN);

LOCAL AREA NETWORKS;

EID: 4143072680     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

1. T.Nishihara, T.Yokoyama, T.Miyashita, and Y.Satoh, 2002 IEEE Ultrason. Symp., pp.944-947.
2. L.M.Lakin, G.R.Kline, and K.T.McCarron, IEEE Trans. Microwave Theory Tech. Vol. 41, No. 12, Dec. 1993, pp.2139-2146.
3. Jeol F.Rosenbaum, Bulk Acoustic Wave Theory and Devices, Artech House Press, 1988, ch.10.
4. R.S.Naik, J.J.Lutsky, R.Reif, C.G.Sodini, A.Becker, L.Fetter, H.Huggins, R.Miller, J.Pastalan, G.Tittenhouse, and Y.-H.Wong, IEEE Trans. Ultrason. Ferro. and Freq. Cont.,Vol.47, No.1, Jan. 2000, pp.292-296.