Multivariate analysis of TOF-SIMS spectra of monolayers on scribed silicon

Analytical Chemistry

Volumn 77, Issue 14, 2005, Pages 4654-4661

  Yang, Li ^a   Lua, Yit Yian ^a   Jiang, Guilin ^a   Tyler, Bonnie J ^b   Linford, Matthew R ^a  

^a Brigham Young University   (United States)

^b Department of Electrical and Computer Engineering   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALDEHYDES; INTERFACES (MATERIALS); OLEFINS; POSITIVE IONS; PRINCIPAL COMPONENT ANALYSIS; SECONDARY ION MASS SPECTROMETRY; SEMICONDUCTING SILICON;

CARBON ATOMS; MULTIVARIATE ANALYSIS; PARTIAL LEAST SQUARES; TIME-OF-FLIGHT (TOF);

MONOLAYERS;

ACID; ALDEHYDE; ALKENE DERIVATIVE; ALKYNE DERIVATIVE; CARBON; SILICON;

ADSORPTION; ARTICLE; INFORMATION PROCESSING; PRINCIPAL COMPONENT ANALYSIS; SURFACE PROPERTY; THICKNESS; TIME OF FLIGHT MASS SPECTROMETRY; TIME OF FLIGHT SECONDARY ION MASS SPECTROMETRY;

EID: 27544436337     PISSN: 00032700     EISSN: None     Source Type: Journal    
DOI: 10.1021/ac050307m     Document Type: Article

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