Liquid crystal polymer based MEMS capacitive pressure sensor

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5798, Issue , 2005, Pages 190-197

  Palasagaram, Jithendra N ^a   Ramadoss, Ramesh ^a  

^a AUBURN UNIVERSITY   (United States)

Author keywords

Capacitive sensors; LCP; MEMS; PCB MEMS; Pressure Sensors

Indexed keywords

CAPACITIVE SENSORS; MEMS; PCB MEMS; PRESSURE SENSORS;

ABSORPTION; CAPACITANCE; COSTS; LIQUID CRYSTAL POLYMERS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MOISTURE; PRESSURE EFFECTS; PRINTED CIRCUIT BOARDS; SILICON;

SENSORS;

EID: 27544432340     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.606642     Document Type: Conference Paper

References (10)

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