8×8 robust capacitive pressure sensor array

American Society of Mechanical Engineers, Dynamic Systems and Control Division (Publication) DSC

Volumn 66, Issue , 1998, Pages 513-517

  Chang, Sung Pil ^a   Lee, Jeong Bong ^a   Allen, Mark G ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

LAMINATING; MICROELECTRODES; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; STAINLESS STEEL; SUBSTRATES;

CAPACITIVE PRESSURE SENSOR ARRAYS;

PRESSURE TRANSDUCERS;

EID: 0032297537     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)