Micromachining techniques for liquid crystal polymer

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2001, Pages 126-130

  Wang, X ^a   Lu, L H ^a   Liu, C ^a  

^a University of Illinois at Urbana Champaign   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

LOW TEMPERATURE OPERATIONS; METALLIZING; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; PLASMA ETCHING;

MICROFABRICATION TECHNIQUES; THERMAL LAMINATION;

LIQUID CRYSTAL POLYMERS;

EID: 0035013822     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)