SCOPUS 정보 검색 플랫폼

Volumn 2, Issue 9, 2005, Pages 3208-3212

Porosity profile determination of porous silicon interference filters by RBS

Author keywords

[No Author keywords available]

Indexed keywords

LIGHT INTERFERENCE; MULTILAYERS; OXIDATION; POROSITY; REFRACTIVE INDEX; RUTHERFORD BACKSCATTERING SPECTROSCOPY;

CONSTANT IN-DEPTH COMPOSITION; OPTICAL BEHAVIOR; OXIDATION DEGREE;

POROUS SILICON;

EID: 27444442750 PISSN: 16101634 EISSN: None Source Type: Conference Proceeding
DOI: 10.1002/pssc.200461115 Document Type: Conference Paper

Times cited : (10)

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