Three-dimensional scanning of ion-implanted porous silicon

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 158, Issue 1, 1999, Pages 658-664

  Simon, A ^a   Paszti F ^b   Manuaba, A ^b   Kiss, A Z ^a  

^a INSTITUTE OF EXPERIMENTAL MEDICINE   (Hungary)

^b WIGNER RESEARCH CENTRE FOR PHYSICS   (Hungary)

Author keywords

[No Author keywords available]

Indexed keywords

DENSIFICATION; ION IMPLANTATION; POROSITY; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SPECTROMETRY;

MICROBEAMS;

POROUS SILICON;

EID: 0343081368     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(99)00386-9     Document Type: Article

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