Comparison of morphology evolution of Ge(001) homoepitaxial films grown by pulsed laser deposition and molecular-beam epitaxy

Applied Physics Letters

Volumn 87, Issue 18, 2005, Pages 1-3

  Shin, Byungha ^a   Leonard, John P ^a,b   McCamy, James W ^a,c   Aziz, Michael J ^a  

^a HARVARD UNIVERSITY   (United States)

^b PA 15260   (United States)

^c PPG Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ENERGETIC SPECIES; FEATURE SEPARATION; HOMOEPITAXIAL GROWTH MORPHOLOGY; PYRAMIDAL MOUNDS;

FILM GROWTH; GERMANIUM; KINETIC ENERGY; MOLECULAR BEAM EPITAXY; MORPHOLOGY; PULSED LASER DEPOSITION;

SEMICONDUCTING FILMS;

EID: 27444434755     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2108115     Document Type: Article

References (25)

1. J. Villain, J. Phys. (Paris) 1, 19 (1991).
2. P. Politi and J. Villain, Phys. Rev. B 54, 5114 (1996).
3. N. E. Lee, G. Xue, and J. E. Greene, J. Appl. Phys. 80, 769 (1996).
4. J. E. Van Nostrand, S. J. Chey, and D. G. Cahill, Phys. Rev. B 57, 12536 (1998).
5. K. A. Bratland, Y. L. Foo, J. Soares, T. Spila, P. Desjardins, and J. E. Greene, Phys. Rev. B 67, 125322 (2003).
6. M. D. Johnson, C. Orme, A. W. Hunt, D. Graff, J. Sudijono, L. M. Sander, and B. G. Orr, Phys. Rev. Lett. 72, 116 (1994).
7. K. Thurmer, R. Koch, M. Weber, and K. H. Rieder, Phys. Rev. Lett. 75, 1767 (1995).
8. D. B. Chrisey and G. K. Hubler, Pulsed Laser Deposition of Thin Films (Wiley, New York, 1994).
9. B. Hinnemann, H. Hinrichsen, and D. E. Wolf, Phys. Rev. E 67, 011602 (2003).
10. M. E. Taylor and H. A. Atwater, Appl. Surf. Sci. 127-129, 159 (1998).
11. P. Ohresser, J. Shen, J. Barthel, M. Zheng, C. V. Mohan, M. Klaua, and J. Kirschner, Phys. Rev. B 59, 3696 (1999).
12. J. M. Warrender, Ph.D. thesis, Harvard University, 2004.
13. X. J. Zhang, G. Xue, A. Agarwal, R. Tsu, M. A. Hasan, J. E. Greene, and A. Rockett, J. Vac. Sci. Technol. A 11, 2553 (1993).
14. S. J. Chey, J. Van Nostrand, and D. G. Cahill, Phys. Rev. B 52, 16696 (1995).
15. J. G. Amar, Phys. Rev. B 60, R11317 (1999).
16. S. Schinzer, M. Kinne, M. Biehl, and W. Kinzel, Surf. Sci. 439, 191 (1999).
17. D. L. Smith, C. C. Chen, G. B. Anderson, and S. B. Hagstrom, Appl. Phys. Lett. 62, 570 (1993).
18. J. A. Floro, B. K. Kellerman, E. Chason, S. T. Picraux, D. K. Brice, and K. M. Horn, J. Appl. Phys. 77, 2351 (1995).
19. S. J. Chey and D. G. Cahill, Surf. Sci. 380, 377 (1997).
20. J. M. Pomeroy, J. Jacobsen, C. C. Hill, B. H. Cooper, and J. P. Sethna, Phys. Rev. B 66, 235412 (2002).
21. P. M. Lam, S. J. Liu, and C. H. Woo, Phys. Rev. B 66, 045408 (2002).
22. J. Amar and F. Family, Phys. Rev. B 54, 14742 (1996).
23. L. H. Tang, P. Smilauer, and D. D. Vvedensky, Eur. Phys. J. B 2, 409 (1998).
24. T. Michely, M. Kalff, G. Comsa, M. Strobel, and K. H. Heinig, J. Phys.: Condens. Matter 14, 4177 (2002).
25. M. Siegert, Phys. Rev. Lett. 81, 5481 (1998).