Plasma immersion ion implantation experiments at the Instituto Nacional de Pesquisas Espaciais (INPE), Brazil

Surface and Coatings Technology

Volumn 136, Issue 1-3, 2001, Pages 28-31

  Ueda, M ^a   Berni, L A ^a   Rossi, J O ^a   Barroso, J J ^a   Gomes, G F ^a   Beloto, A F ^a   Abramof, E ^a  

^a INSTITUTO NACIONAL DE PESQUISAS ESPACIAIS   (Brazil)

Author keywords

[No Author keywords available]

Indexed keywords

GLOW DISCHARGES; ION IMPLANTATION; IRON COMPOUNDS; MICROWAVES; PULSE GENERATORS; SILICON NITRIDE; SURFACE TREATMENT;

IRON NITRIDE; PLASMA IMMERSION ION IMPLANTATION (PIII);

PLASMA SOURCES;

EID: 0035254329     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(00)01004-5     Document Type: Article

References (12)

1. M. Ueda, C. Stellati, J.J. Barroso, M.C.A. Nono, A. Alexander, Proceedings of the XVII International Symposium on Disch. and Electrical Instruments in Vacuum, Berkeley, CA, July 1996, II, (1996) 603.
2. M. Ueda, L.A. Berni, G.F. Gomes, A.F. Beloto, E. Abramof, H. Reuther, J. Appl. Phys. 86 (1999) 4821.
3. M. Ueda, G.F. Gomes, L.A. Berni et al., Nucl. Instrum. Methods B 161-163 (2000) 1064.
4. M. Ueda, A.F. Beloto, H. Reuther, S. Parascandola, this conference.
5. V. Spassov, M. Ueda, J.J. Barroso, Surf. Coat. Technol. 112 (1999) 29.
6. G.A. Collins, R. Hutchings, K.T. Short, J. Tendys, Surf. Coat. Technol. 103/104 (1998) 212.
7. C. Blawert, B.L. Mordike, G.A. Collins, K.T. Short, J. Tendys, Surf. Coat. Technol. 103/104 (1998) 240.
8. W. Ensinger, Surf. Coat. Technol. 100/101 (1998) 341.
9. J.O. Rossi, M. Ueda, J.J. Barroso, V.A. Spassov, IEEE Trans. Plasma Sci., submitted.
10. S. Mandl, R. Gunzel, E. Richter, W. Moller, Surf. Coat. Technol. 100/101 (1999) 372.
11. J.J. Vajo, J.D. Williams, R. Wei, R.G. Wilson, J.M. Matosian, J. Appl. Phys. 76 (1994) 5666.
12. W. Ensinger et al., Appl. Phys. Lett. 72 (1998) 1164.