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Diamond and Related Materials

Volumn 7, Issue 6, 1998, Pages 835-838

Subplantation effect in magnetron sputtered superhard boron carbide thin films

(5) Ulrich, S a Ehrhardt, H b Schwan, J b Samlenski, R c Brenn, R c

a KARLSRUHE INSTITUTE OF TECHNOLOGY (Germany)

b Rheinland Pfälzische Technische Universität Kaiserslautern Landau (Germany)

c UNIVERSITY OF FREIBURG (Germany)

Author keywords

Boron carbide; Magnetron; Subplantation; Thin films

Indexed keywords

AMORPHOUS MATERIALS; ARGON; HARDNESS; ION IMPLANTATION; MAGNETRON SPUTTERING; THIN FILMS;

SUBPLANTATION;

BORON CARBIDE;

EID: 0032094267 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/S0925-9635(97)00306-3 Document Type: Article

Times cited : (61)

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