Fabrication and evaluation of single-crystal silicon cantilevers with ultra-low spring constants

Journal of Micromechanics and Microengineering

Volumn 15, Issue 11, 2005, Pages 2179-2183

  Lee, Dong Weon ^a   Kang, Jung Ho ^b   Gysin, Urs ^c   Rast, Simon ^c   Meyer, Ernst ^c   Despont, Michel ^d   Gerber, Christoph ^d  

^a Chonnam National University   (South Korea)

^b Samsung Advanced Institute of Technology (SAIT)   (South Korea)

^c UNIVERSITY OF BASEL   (Switzerland)

^d IBM RESEARCH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

EVALUATION; FABRICATION; FRICTION; MAGNETIC RESONANCE; PRESSURE EFFECTS; SINGLE CRYSTALS;

MAGNETIC RESONANCE FORCE MICROSCOPY; PHONON SCATTERING; SILICON CANTILEVERS; SPRING CONSTANTS;

SEMICONDUCTING SILICON;

EID: 27144500148     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/11/026     Document Type: Article

References (13)

1. Binnig G, Quate C F and Gerber Ch 1986 Atomic force microscope Phys. Rev. Lett. 56 930-3
2. Rugar D, Zuger O, Hoen S, Yannoni C S, Vieth H M and Kendrick R D 1994 Attonewton force detection of nuclear magnetic resonance Science 264 1560-3
3. Rast S, Wattinger C, Gysin U and Meyer E 2000 The noise of cantilever Nanotechnology 11 169-72
4. Yang J L, Ono T and Esashi M 2002 Energy dissipation in submicrometer thick silicon crystal silicon cantilever J. Microelectromech. Syst. 11 775-83
5. Ono T, Wang D F and Esashi M 2003 Time dependence of energy dissipation in resonating silicon cantilevers in ultrahigh vacuum Appl. Phys. Lett. 83 1950-2
6. Stowe T D, Yasumura K, Kenny T W, Botkin D, Wago K and Rugar D 1997 Attonewton force detection using ultrathin silicon cantilever Appl. Phys. Lett. 71 288-90
7. Hutter J L and Bechhoefer J 1993 Calibration of atomic-force microscope tips Rev. Sci. Instrum. 64 1868-73
8. Wachman J B, Tefft W E, Lam D G and Apstein C S 1961 Phys. Rev. 122 1754
9. Zener C 1937 Internal friction in solids 1: theory of internal friction in reeds Phys. Rev. 52 230-5
10. Zener C 1938 Internal friction in solids 2: general theory of thermoelastic friction Phys. Rev. 53 90-9
11. Gysin U, Rast S, Ruff P, Meyer E, Lee D W, Vettiger P and Gerber C 2004 Temperture dependence of the force sensitivity of silicon cantilevers Phys. Rev. B 69 045403
12. Wang Xuefeng, Vincent Loren, Bullen David, Zou Jun and Liu Chang 2005 Scanning probe lithography tips with spring-on-tip designs: analysis, fabrication, and testing Appl. Phys. Lett. 87 054102
13. http://www.nanosensors.com/products_overview.html