Capacitive slanted-beam three-axis accelerometer: I. Modelling and design

Journal of Micromechanics and Microengineering

Volumn 15, Issue 11, 2005, Pages 1989-1996

  Rödjegård, Henrik ^a   Andersson, Gert I ^a   Rusu, Cristina ^a   Löfgren, Mikael ^a,b   Billger, Dag ^a  

^a Imego AB The Institute of Micro and Nanotechnology   (Sweden)

^b MIllicore AB   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; CAPACITANCE; DAMPING; ERROR ANALYSIS; FREQUENCY RESPONSE; MACHINE DESIGN; MATHEMATICAL MODELS; OPTICAL RESOLVING POWER;

GAS-FILM DAMPING; PROCESS ERRORS; PROTOTYPE DEVICES; SEISMIC MASSES;

ACCELEROMETERS;

EID: 27144473288     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/11/001     Document Type: Article

References (14)

1. Silicon Designs Inc. Triaxial accelerometer 'model 2412', Product description available at http://www.silicondesigns.com/Prod.html
2. Mineta T, Kobayashi S, Watanabe Y, Kanauchi S, Nakagawa I, Suganuma E and Esashi M 1996 Three-axis capacitive accelerometer with uniform axial sensitivities J. Micromech. Microeng. 6 431-5
3. Takao H, Matsumoto Y and Ishida M 1999 A monolithically integrated three-axis accelerometer using CMOS compatible stress-sensitive differential amplifiers IEEE Trans. Electron Devices 46 109-16
4. Kwon K and Park S 1998 A bulk-micromachined three-axis accelerometer using silicon direct bonding technology and polysilicon layer Sensors Actuators A 66 250-5
5. Matsumoto Y, Nishimura M, Matsuura M and Ishida M 1999 Three-axis SOI capacitive accelerometer with PLL C-V converter Sensors Actuators A 75 77-85
6. Andersson G I 1995 A novel 3-axis monolithic silicon accelerometer 8th Int. Conf. on Solid-State Sensors and Actuators, Transducers '95/Eurosensors IX (Stockholm, Sweden) vol 2 pp 558-61
7. Seidel H, Schalk J and Prechtel U 2000 US Patent Number 6122965
8. Bütefisch S, Schoft A and Büttgenbach S 2000 Three-axes monolithic silicon low-g accelerometer J. Microelectromech. Syst. 9 551-6
9. Young W C 1989 Roark's Formulas for Stress and Strain 6th edn (New York: McGraw-Hill) pp 100 122 348 464
10. Nordling C and Österman J 1987 Physics Handbook 4th edn (Sweden: Studentlitteratur) p 141
11. Darling R B, Hivick C and Xu J 1998 Compact analytical modelling of squeeze film damping with arbitrary venting conditions using a Green's function approach Sensors Actuators A 70 32-41
12. Sjölander D 2001 Modelling of squeezed gas film damping in micro mechanical gyroscopes Master Thesis Report Number 2001:3 Institution of Applied Mechanics, Chalmers University of Technology, Göteborg, Sweden
13. Andersson G I, Hedenstierna N, Svensson P and Pettersson H 1999 A novel silicon bulk gyroscope Transducers '99 Digest of Technical Papers (Sendai, Japan) vol 2 pp 902-5
14. Rödjegård H and Andersson G 2001 A monolithic three-axis accelerometer with symmetric properties 11th Int. Conf. on Solid-State Sensors and Actuators, Transducers '01/Eurosensors XV (Munich, Germany) vol 1 pp 442-5