Robust and precision motion control system of linear-motor direct drive for high-speed X-Y table positioning mechanism

IEEE Transactions on Industrial Electronics

Volumn 52, Issue 5, 2005, Pages 1357-1363

  Liu, Zuo Zong ^a   Luo, Fang Lin ^b   Rahman, M Azizur ^c  

^a Shan Dong Jianzhu University   (China)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^c MEMORIAL UNIVERSITY OF NEWFOUNDLAND   (Canada)

Author keywords

Acceleration; Bandwidth; H based precision motion control; Linear motor direct drive; Precision motion control; Robust control; X Y table positioning mechanism

Indexed keywords

ACCELERATION; BANDWIDTH; CASCADE CONTROL SYSTEMS; CONTROL SYSTEM SYNTHESIS; ELECTRIC DRIVES; FEEDBACK CONTROL; OPTIMAL CONTROL SYSTEMS; POSITION CONTROL; ROBUSTNESS (CONTROL SYSTEMS); SEMICONDUCTOR DEVICE MANUFACTURE; VELOCITY CONTROL;

FEEDFORWARD COMPENSATOR CONTROL; LINEAR-MOTOR DIRECT DRIVE; PRECISION MOTION CONTROL SYSTEM; X-Y TABLE POSITIONING MECHANISM;

LINEAR MOTORS;

EID: 27144454369     PISSN: 02780046     EISSN: None     Source Type: Journal    
DOI: 10.1109/TIE.2005.855661     Document Type: Article

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