Improvement of mechanical properties of nanometer period multilayer films at interfaces of each layer

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 21, Issue 2, 2003, Pages 785-789

  Miyake, Shojiro ^a  

^a NIPPON INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BORON COMPOUNDS; CARBON NITRIDE; GRAPHITE; HARDNESS; NANOSTRUCTURED MATERIALS; SUBSTRATES; TRIBOLOGY; WEAR RESISTANCE;

NANOINDENTATION;

MULTILAYERS;

EID: 0037274498     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1560217     Document Type: Article

References (17)

1. S. Miyake and R. Kaneko, Thin Solid Films 212, 256 (1992).
2. S. Miyake, R. Kaneko, Y. Kikuya, and I. Sugimoto, Trans. ASME, J. Tribol. 113, 384 (1991).
3. S. Miyake, T. Miyamoto, R. Kaneko, and T. Miyazaki, IEICE Trans. Electron. E78-C, 180 (1995).
4. S. Miyake, R. Kaneko, and T. Miyamoto, Nucl. Instrum. Methods Phys. Res. B 108, 70 (1996).
5. S. Miyake, S. Watanabe, M. Murakawa, R. Kaneko, and T. Miyamoto, Thin Solid Films 212, 262 (1992).
6. A. Y. Liu and M. L. Cohen, Mater. Res. Soc. Symp. Proc. 193, 95 (1990).
7. M. Y. Chen, X. Lin, V. P. Dravid, Y. W. Chung, M. S. Wong, and W. D. Sproul, Surf. Coat. Technol. 54/55, 360 (1992).
8. M. Y. Chen, D. Li, X. Lin, V. P. Dravid, Y. W. Chung, M. S. Wong, and W. D. Sproul, J. Vac. Sci. Technol. A 11, 521 (1993).
9. C. Niu, Y. Z. Lu, and C. M. Lieber, Science 261, 334 (1993).
10. D. Li, E. Cutiongco, Y. W. Chung, M. S. Wong, and W. D. Sproul, Surf. Coat. Technol. 68/69, 611 (1994).
11. S. Miyake, S. Watanabe, H. Miyazawa, M. Murakawa, R. Kaneko, and T. Miyamoto, Appl. Phys. Lett. 65, 3206 (1994).
12. Y. W. Chung, Mater. Res. Soc. Symp. Proc. 403, 227 (1996).
13. X. Chu, M. S. Wong, W. D. Sproul, S. L. Rhode, and S. A. Barnet, J. Vac. Sci. Technol. A 10, 1604 (1992).
14. L. A. Donahue, J. Cawley, D. B. Lewis, J. S. Brooks, and W. D. Munz, Surf. Coat. Technol. 76-77, 149 (1995).
15. X. Chu and S. A. Barnett, J. Appl. Phys. 77, 4403 (1995).
16. S. Miyake, K. Matsuzaki, and M. Asano, Proceedings of the International Tribology Conference, Nagasaki, 2000 (JAST, Tokyo, 2000), p. 721.
17. Z. N. Farhat, Y. Ding, D. O. Northwood, and A. T. Alps, Surf. Coat. Technol. 89, 24 (1997).