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Volumn 285, Issue 1-2, 2005, Pages 96-102

Effect of annealing atmosphere on physical characteristics and photoluminescence properties of nitrogen-implanted ZnO thin films

(4) Yang, Chih Cheng a Lin, Chin Ching a Peng, Cheng Hsiung a Chen, San Yuan a

a NATIONAL CHIAO TUNG UNIVERSITY (Taiwan)

Author keywords

A1. Annealing atmosphere; A1. Nitrogen implantation; A1. Photoluminescence; B1. ZnO

Indexed keywords

ANNEALING; CRYSTALLOGRAPHY; ION IMPLANTATION; LIGHT EMISSION; NITROGEN; OXYGEN; PHOTOLUMINESCENCE; SECONDARY ION MASS SPECTROMETRY; THERMAL EFFECTS; THIN FILMS;

ANNEALING ATMOSPHERE; CRYSTALLINITY; NITROGEN CONCENTRATION; NITROGEN IMPLANTATION;

ZINC OXIDE;

EID: 27144435853 PISSN: 00220248 EISSN: None Source Type: Journal
DOI: 10.1016/j.jcrysgro.2005.07.048 Document Type: Article

Times cited : (12)

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