Rapid manufacturing of embedded microchannels from a single layered SU-8, and determining the dependence of SU-8 young's modulus on exposure dose with a laser acoustic technique

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2005, Pages 654-657

  Yu, H ^a   Balogun, O ^a   Li, B ^a   Murray, T W ^a   Zhang, X ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

ELASTIC MODULI; ELECTRONIC EQUIPMENT MANUFACTURE; NONDESTRUCTIVE EXAMINATION; SCANNING; ULTRASONICS;

LASER ACOUSTIC MICROSCOPY; MICROCHANNELS; RAPID MANUFACTURING;

MICROELECTROMECHANICAL DEVICES;

EID: 26844556995     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)

1. S. Hsieh, C. Lin, C. Huang and H. Tsai, "Liquid flow in a micro-channel," J. Micromech. Microeng., vol. 14, pp. 436-445, 2004.
2. I. Papautsky, A.B. Frazier and H. Swerdlow, "A low temperature IC compatible process for fabrication surface micromachined metallic microchannels," MEMS '97, pp. 317-322.
3. G. Stemme, "Micro fluid sensors and actuators," Proceeding of the Sixth International Symposium on Micro Machine and Human Science, pp. 45-52, 1995.
4. R.W. Tjerkstra, M. de Boer, E. Berenshot, J.G.E. Gardeniers, A. van den Berg and M. Elwenspoek, "Etching technology for microchannels," MEMS '97, pp. 147-152.
5. L.J. Guerin, M. Bossel, M. Demierre, S. Calmes and P. Renaud, "Simple and low cost fabrication of embedded micro-channels by using a new thick-film photoplastic," Transducers' 97, pp. 1419-1422.
6. M.O. Heuschkel, L. Guerin, B. Buisson, D. Bertrand and P. Renaud, "Buried microchannels in photopolymer for delivering of solutions to neurons in a network," Sensors and Actuators B, vol. 48, pp. 356-361, 1998.
7. F.E.H Tay, J.A.V Kan, F. Watt and W.O. Choong, "A novel micro-machining method for the fabrication of thick-film SU-8 embedded micro-channels," J. Micromech. Microeng., vol. 11, pp. 27-32, 2000.
8. Y.J. Chuang, F.G. Tseng, J.H. Cheng and W.K. Lin, "A novel fabrication method of embedded micro-channels by using SU-8 thick-film photoresists," Sensors and Actuators A, vol. 103, pp. 64-69, 2003.
9. H. Yu, A.W. Grüintzig, Y. Zhao, A. Sharon, B. Li and X. Zhang, "Rapid prototyping 3D microstructures on soft and rigid templates using a scanning laser system," microTAS '03, pp. 347-350.
10. R. Feng and R.J. Farris, "Influence of processing conditions on the thermal and mechanical properties of SU8 negative photoresist coatings," J. Micromech. Microeng., vol. 13, pp. 80-83, 2003.
11. S.J. Davis, C. Edwards, G.S. Taylor and S.B. Palmer, "Laser generated ultrasound: its properties, mechanisms, and multifarious applications," J. Phys. D., vol. 26, pp. 329-348, 1993.