Low temperature IC compatible process for fabricating surface micromachined metallic microchannels

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1997, Pages 317-322

  Papautsky, Ian ^a   Frazier, A Bruno ^a   Swerdlow, Herald ^a  

^a UNIVERSITY OF UTAH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

GOLD; MICROMACHINING; NICKEL; PHOTORESISTS; SEMICONDUCTING GLASS; SEMICONDUCTING SILICON; SUBSTRATES;

GLASS SUBSTRATES; METALLIC MICROCHANNELS; SILICON SUBSTRATES;

INTEGRATED CIRCUIT MANUFACTURE;

EID: 0030645998     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (20)