Resonant magnetic field sensor with frequency output

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2005, Pages 339-342

  Sunier, R ^a   Li, Y ^a   Kirstein, K U ^a   Vancura, T ^a   Baltes, H ^a   Brand, O ^b  

^a ETH ZURICH   (Switzerland)

^b GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATMOSPHERIC PRESSURE; CMOS INTEGRATED CIRCUITS; FREQUENCY STABILITY; MAGNETIC FIELD EFFECTS; MICROMACHINING; NATURAL FREQUENCIES; OSCILLATIONS; RESONATORS; SENSITIVITY ANALYSIS; SIGNAL PROCESSING;

CANTILEVER-BASED MICROSENSORS; LORENTZ FORCES; POST-PROCESSING MICROMACHINING; RESONANT MAGNETIC FIELD SENSORS;

MICROSENSORS;

EID: 26844465584     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

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