300nm-thick cantilever in PDMS for tactile sensing

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2005, Pages 283-286

  Noda, Kentaro ^a   Hoshino, Kazunori ^a   Matsumoto, Kiyoshi ^a   Shimoyama, Isao ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DEFORMATION; PIEZOELECTRIC DEVICES; SENSITIVITY ANALYSIS; SENSORS; SHEAR STRESS; SURFACES;

ONE-DIRECTIONAL DEFORMATION; PDMS; PIEZORESISTIVE CANTILEVERS; TACTILE SENSING;

MICROELECTROMECHANICAL DEVICES;

EID: 26844456602     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

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