Sequential batch assembly of 3-D microstructures with elastic hinges by a magnetic field

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2002, Pages 188-191

  Iwase, Eiji ^a   Takeuchi, Shoji ^a   Shimoyama, Isao ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTICITY; MAGNETIC ANISOTROPY; MAGNETIC FIELDS; MAGNETIC MATERIALS; MICROSTRUCTURE; STRUCTURE (COMPOSITION); THREE DIMENSIONAL;

ELASTIC HINGE; SEQUENTIAL BATCH ASSEMBLY;

MICROELECTROMECHANICAL DEVICES;

EID: 0036123963     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

1. Microfabricated hinges
2. Scratch drive actuator with mechanical links for self-assembly of three-dimensional MEMS
3. Demonstration of three-dimensional microstructure self-assembly
4. Magnetically actuated, addressable microstructures
5. Magnetic actuation of hinged microstructures
6. Insect-model based microrobot with elastic hinges
7. Plastic deformation magnetic assembly (PDMA) of out-of-plane maicrostructures: Technology and application