Active-head sliders using piezoelectric thin films for flying height control

Microsystem Technologies

Volumn 11, Issue 8-10, 2005, Pages 836-842

  Suzuki, Kenji ^a   Akimatsu, Takayuki ^a   Sasaki, Kenji ^a   Kurita, Masayuki ^b  

^a KOGAKUIN UNIVERSITY   (Japan)

^b HITACHI LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; AERODYNAMICS; HARD DISK STORAGE; INTERFEROMETRY; LUBRICATION; MICROMACHINING; PIEZOELECTRIC MATERIALS; SURFACE PHENOMENA; SUSPENSIONS (COMPONENTS);

ACTIVE-HEAD SLIDERS; FLYING HEIGHT CONTROL; MOLECULAR GAS FILM LUBRICATION (MGL) THEORY; PIEZOELECTRIC THIN FILMS;

THIN FILMS;

EID: 26444600136     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-005-0543-3     Document Type: Conference Paper

References (8)

1. Castelli V, Pirvics J (1968) Review of numerical methods in gas bearing film analysis. Trans ASME J Lubrication Tech 90:777-792
2. Fukui S, Kaneko R (1988) Analysis of ultra-thin gas film lubrication based on linearized Boltzmann equation First report-derivation of a generalized lubrication equation including thermal creep flow. Trans ASME J Tribology 110:253-261
3. Fukui S, Kaneko R (1990) A database for interpolation of poiseuille flow rates for high knudsen number lubrication problems. Trans ASME J Tribology 112:78-83
4. Khanna VD, Hendriks F (1990) Programmable air bearing sliders for magnetic storage. In: STLE Special Publication, SP-29 pp 43-48
5. Kurita, M. et al (2002) An Active-head slider with a piezo-electric actuator for controlling flying height,. IEEE Trans on Magnetics, 38(5):2102-2104
6. Machtle P et al (2001) Integrated microheaters for in-situ flying-height control of sliders used in hard-disk drives. In: Technical digest of MEMS 2001, pp 196-199
7. Tagawa N (2002), Design and fabrication of MEMS-based active sliders using double-layered composite PZT thin films in hard disk drives, In: Digest of the Aisa Pacific magnetic recording conference 2002, pp CP4-01-02
8. Yeack-Scranton CE, Khanna VD, Etzold KF, Praino AP, (1990) An active slider for practical contact recording, IEEE. Trans on Magnetics, 26(5):2478-2483