-
1
-
-
4143150811
-
Lithography with 157nm lasers
-
T.M. Bloomstein, M.W. Horn, M. Rothschild, R.R. Kunz, S.T. Palmacci, R.B. Goodman, "Lithography with 157nm lasers", J. Vac. Sci. technol. B 15, 2112, 1997.
-
(1997)
J. Vac. Sci. Technol. B
, vol.15
, pp. 2112
-
-
Bloomstein, T.M.1
Horn, M.W.2
Rothschild, M.3
Kunz, R.R.4
Palmacci, S.T.5
Goodman, R.B.6
-
2
-
-
0030562987
-
Excimer laser ablation of polymers & glasses for grating fabrication
-
P.E. Dyer, R.J. Farley, R. Giedl, D.M. Karnakis, "Excimer laser ablation of polymers & glasses for grating fabrication", Appl. Sur. Sci. 96-98, 537, 1996.
-
(1996)
Appl. Sur. Sci.
, vol.96-98
, pp. 537
-
-
Dyer, P.E.1
Farley, R.J.2
Giedl, R.3
Karnakis, D.M.4
-
3
-
-
0029531783
-
Current filamentation of strongly preionized high pressure glow discharges in Ne/Xe/HCl mixtures
-
R. Dreiskemper, W. Bötticher, "Current Filamentation of Strongly Preionized High Pressure Glow Discharges in Ne/Xe/HCl Mixtures", IEEE Trans. Plasma Sci., 23, 987, 1995.
-
(1995)
IEEE Trans. Plasma Sci.
, vol.23
, pp. 987
-
-
Dreiskemper, R.1
Bötticher, W.2
-
4
-
-
0022779732
-
Prionization and discharge stability study of long optical pulse duration UV-preionized XeCl lasers
-
R. S. Taylor, "Prionization and discharge stability study of long optical pulse duration UV-preionized XeCl lasers", Appl. Phys., B 41, 1-24, 1986.
-
(1986)
Appl. Phys., B
, vol.41
, pp. 1-24
-
-
Taylor, R.S.1
-
5
-
-
0002139921
-
Long pulse operation of an x-ray preionized molecular fluorine laser excited by a prepulse-main pulse system with a magnetic switch
-
H.M.J. Bastiaens, S.J.M. Peters, X. Renard, P.J.M. Peters, W.J. Witteman, "Long pulse operation of an x-ray preionized molecular fluorine laser excited by a prepulse-main pulse system with a magnetic switch", Appl. Phys. Letters, 72, 2791-2793, 1998.
-
(1998)
Appl. Phys. Letters
, vol.72
, pp. 2791-2793
-
-
Bastiaens, H.M.J.1
Peters, S.J.M.2
Renard, X.3
Peters, P.J.M.4
Witteman, W.J.5
-
6
-
-
0003311339
-
On the long pulse operation of an x-ray preionized, gas discharge pumped ArF excimer laser
-
L. Feenstra, H.M.J. Bastiaens, P.J.M. Peters, W.J. Witteman, "On the long pulse operation of an x-ray preionized, gas discharge pumped ArF excimer laser", Appl. Phys. Letters, 75, 1033-1035, 1999.
-
(1999)
Appl. Phys. Letters
, vol.75
, pp. 1033-1035
-
-
Feenstra, L.1
Bastiaens, H.M.J.2
Peters, P.J.M.3
Witteman, W.J.4
-
8
-
-
0027556032
-
Fast rise time x ray preionisation source using a corona plasma cathode
-
F.A. van Goor, "Fast rise time x ray preionisation source using a corona plasma cathode", J. Phys. D., 26, 404, 1993.
-
(1993)
J. Phys. D.
, vol.26
, pp. 404
-
-
Van Goor, F.A.1
-
9
-
-
0026141971
-
Effect of preionisation on uniformity of photo triggered XeCl laser discharges: Modeling and comparison with experimental results
-
S. Bollanti, T. Letardi, C. Czheng, "Effect of preionisation on uniformity of photo triggered XeCl laser discharges: Modeling and comparison with experimental results", IEEE Trans. Plasma Sci., 19, 361, 1991.
-
(1991)
IEEE Trans. Plasma Sci.
, vol.19
, pp. 361
-
-
Bollanti, S.1
Letardi, T.2
Czheng, C.3
-
10
-
-
0022813025
-
Instability of a uniform self-sustained discharge in excimer lasers
-
V.M. Borisov, V.P. Novikov, O.B. Khristoforov, "Instability of a uniform self-sustained discharge in excimer lasers", High Temperature, 24, 1079, 1986.
-
(1986)
High Temperature
, vol.24
, pp. 1079
-
-
Borisov, V.M.1
Novikov, V.P.2
Khristoforov, O.B.3
|