On the long pulse operation of an x-ray preionized, gas discharge pumped ArF excimer laser

Applied Physics Letters

Volumn 75, Issue 8, 1999, Pages 1033-1035

  Feenstra, L ^a   Bastiaens, H M J ^a   Peters, P J M ^a   Witteman, W J ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0003311339     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.124587     Document Type: Article

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