Characteristics of DLC films by DC magnetron sputtering incorporated with cesium

Vacuum

Volumn 72, Issue 4, 2004, Pages 445-451

  Choi, Dong Joon ^a   Koo, Won Hoe ^a   Jeong, Soon Moon ^a   Han, Dong Won ^a   Lee, Duck Yeon ^a   Baik, Hong Koo ^a   Jang, Serk Won ^b   Lee, Sung Man ^b  

^a Yonsei University   (South Korea)

^b Kangwon National University   (South Korea)

Author keywords

Cesium; Diamond like carbon; Negative carbon ion; Subplantation

Indexed keywords

CESIUM; CURRENT VOLTAGE CHARACTERISTICS; DEPOSITION; ENERGY DISSIPATION; FRICTION; ION BOMBARDMENT; IONS; MAGNETRON SPUTTERING; RAMAN SPECTROSCOPY;

ENERGY FLUX; FILTERED CATHODIC VACUUM ARC (FCVA); SUBPLANTATION;

DIAMOND LIKE CARBON FILMS;

EID: 0348011356     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2003.10.004     Document Type: Article

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