Numerical analysis of pull-in voltage for contact MEMS switches in switched-line phase shifter application

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5774, Issue , 2005, Pages 587-590

  Jiang, Ling ^a   Shi, Yanling ^a   Li, Wei ^a   Ding, Yanfang ^a   Lai, Zongsheng ^a   Zhu, Ziqiang ^a  

^a EAST CHINA NORMAL UNIVERSITY   (China)

Author keywords

Contact MEMS switch; Pull in voltage; RF MEMS; Switched line phase shifter

Indexed keywords

ELECTRIC POTENTIAL; MATHEMATICAL MODELS; NUMERICAL ANALYSIS; PHASE SHIFTERS; RESIDUAL STRESSES; SWITCHES; WAVEGUIDES;

CONTACT MEMS SWITCH; PULL-IN-VOLTAGE; RF MEMS; SWITCHED-LINE PHASE SHIFTER;

MICROELECTROMECHANICAL DEVICES;

EID: 25644459404     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.607900     Document Type: Conference Paper

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