Tunable infrared filter based on elastic polymer springs

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5770, Issue , 2005, Pages 190-198

  Almasri, Mahmoud ^b   Zhang, Weihong ^a   Kine, Allen ^a   Chan, Yat ^c   Larue, John C ^a   Nelson, Richard ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^c AEROSPACE CORPORATION   (United States)

Author keywords

Fabry Perot; PDMS springs; Photodefinable PDMS; Tunable filter

Indexed keywords

FABRY-PEROT; PDMS SPRINGS; PHOTODEFINABLE POLYMETHYLSILXANE (PDMS); TUNABLE FILTERS;

ANTIREFLECTION COATINGS; ELECTROSTATICS; FABRY-PEROT INTERFEROMETERS; POLYMERS; REFLECTION; SILICON WAFERS; VOLTAGE MEASUREMENT;

SPRINGS (COMPONENTS);

EID: 25644451388     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.601981     Document Type: Conference Paper

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