Design and fabrication of GaAs-GaAlAs micromachined tunable filter with thermal strain control

Journal of Lightwave Technology

Volumn 21, Issue 3, 2003, Pages 596-601

  Amano, T ^a   Koyama, F ^a   Hino, T ^a   Arai, M ^a   Mastutani, A ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Micromachining; Semiconductor DBR; Thermal; Tunable filter

Indexed keywords

ELECTROSTATICS; GALLIUM COMPOUNDS; HEATING; MICROMACHINING; TUNING;

TUNABLE FILTERS;

WAVE FILTERS;

EID: 0037955573     PISSN: 07338724     EISSN: None     Source Type: Journal    
DOI: 10.1109/JLT.2003.809541     Document Type: Conference Paper

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