Thermal stability of metal containing diamond-like carbon thin film fabricated by dual plasma deposition

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5774, Issue , 2005, Pages 330-335

  Fu, Ricky K Y ^a   Mei, Y F ^a   Fu, M Y ^a   Wei, C B ^a   Siu, G G ^a   Chu, Paul K ^a   Cheung, W Y ^b   Wong, S P ^b  

^a CITY UNIVERSITY OF HONG KONG   (Hong Kong)

^b CHINESE UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

Metal cathodic arc deposition; Metal doped DLC; Thermal stability

Indexed keywords

ADHESION; ANNEALING; CARBON; DIAMONDS; DOPING (ADDITIVES); NANOSTRUCTURED MATERIALS; THERMODYNAMIC STABILITY; X RAY DIFFRACTION;

METAL CATHODIC ARC DEPOSITION; METAL-DOPED DLC;

THIN FILMS;

EID: 25644449744     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.607377     Document Type: Conference Paper

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