Thermal effects by the sensitive coating of calorimetric gas sensors

Sensors and Actuators, B: Chemical

Volumn 111-112, Issue SUPPL., 2005, Pages 96-101

  Furjes P ^a   Adam M ^a   Ducso Cs ^a   Zettner, J ^b   Barsony I ^a,c  

^a RESEARCH INSTITUTE FOR TECHNICAL PHYSICS AND MATERIALS SCIENCE   (Hungary)

^b Thermosensorik GmbH   (Germany)

^c MFA ^*  (Hungary)

Author keywords

Calorimetric gas sensors; Frequency response; Microfilaments; Phase response; Thermal response

Indexed keywords

HOTPLATES; POROUS CATALYSTS; SENSITIVE COATINGS; THERMAL BEHAVIOR;

CALORIMETRY; CATALYSTS; COATING TECHNIQUES; COMPUTATIONAL GEOMETRY; EQUIVALENT CIRCUITS; THERMAL EFFECTS;

CHEMICAL SENSORS;

EID: 25444501777     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2005.07.004     Document Type: Conference Paper

References (10)

1. M. Gall The Si-planar-pellistor array, a detection unit for combustible gases Sens. Actuators B 15-16 1993 260 264
2. Cs. Dücso, M. Ádám, P. Fürjes, M. Hirschfelder, S. Kulinyi, and I. Bársony Explosion-proof monitoring of hydrocarbons by micropellistor Sens. Actuators B 95 2003 188 193
3. P. Fürjes, Cs. Dücso, M. Ádám, A. Morrissey, and I. Bársony Materials and processing for realisation of micro-hotplates operated at elevated temperature J. Micromech. Microeng. 12 2002 425 429
4. Cs. Dücso Porous Si bulk micro-machining for thermally isolated membrane formation Sens. Actuators A 60 1997 235 239
5. F. Hedrich, S. Billat, and W. Lang Structuring of membrane sensors using sacrificial porous silicon Sens. Actuators A 84 2000 315 323
6. G. Kaltsas, and A. Nassiopoulou Bulk silicon micromachining using porous silicon sacrificial layer Microelectron. Eng. 35 1997 397 400
7. P. Fürjes, Cs. Dücso, M. Ádám, J. Zettner, and I. Bársony Thermal characterisation of micro-hotplates applied in sensor structures Proceedings of Eurotherm Reims 2003 59 60
8. V. Székely On the representation of infinite lenght distributed RC one-ports IEEE Trans. Circuits Syst. V 38 1991 711 719
9. M. Rencz, Dynamic temperature analysis of electronic systems, Future Circuits International No. 7, 2001, pp. 51-54.
10. S. Huth, O. Breitenstein, and A. Huber Lock-in IR-thermography - a novel tool for material and device characterization Sol. St. Phen. 82-84 2002 741 746