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Volumn 149, Issue 6, 2002, Pages
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Chemical limitations of macropore formation on medium-doped p-type silicon
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Author keywords
[No Author keywords available]
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Indexed keywords
ANODIC OXIDATION;
COMPOSITION;
CURRENT VOLTAGE CHARACTERISTICS;
ELECTRIC CONDUCTIVITY OF SOLIDS;
ELECTROCHEMISTRY;
ELECTROLYTES;
MORPHOLOGY;
ORGANIC SOLVENTS;
POROUS MATERIALS;
SCANNING ELECTRON MICROSCOPY;
SEMICONDUCTOR DOPING;
SINGLE CRYSTALS;
ANODIZATION;
GALVANOSTATIC OXIDATION;
MACROPOROUS SILICON;
ORGANIC ELECTROLYTES;
SILICON WAFERS;
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EID: 0036608150
PISSN: 00134651
EISSN: None
Source Type: Journal
DOI: 10.1149/1.1475688 Document Type: Article |
Times cited : (51)
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References (19)
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