Annealing effects on zirconium nitride films

Applied Surface Science

Volumn 230, Issue 1-4, 2004, Pages 88-93

  Bhuvaneswari, H B ^b   Rajagopal Reddy, V ^b   Chandramani, R ^c   Rao, G Mohan ^a  

^a INDIAN INSTITUTE OF SCIENCE   (India)

^b UNIVERSITY OF MYSORE   (India)

^c BANGALORE UNIVERSITY   (India)

Author keywords

Annealing; Nano particles; Pits formation; Resistivity; Schottky devices; Sputtering

Indexed keywords

ANNEALING; ELECTRIC CONDUCTIVITY; GRAIN SIZE AND SHAPE; MAGNETRON SPUTTERING; PARTIAL PRESSURE; REFRACTIVE INDEX; SCANNING ELECTRON MICROSCOPY; THIN FILMS;

NANO-PARTICLES; PITS FORMATIONS; SCHOTTKY DEVICES;

ZIRCONIUM COMPOUNDS;

EID: 2542462464     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2004.02.055     Document Type: Article

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