Glass cutting by femtosecond pulsed irradiation

Journal of Microlithography, Microfabrication and Microsystems

Volumn 3, Issue 2, 2004, Pages 358-363

  Vanagas, Egidijus ^a   Kawai, Jouji ^a   Tuzhilin, Dmitrii ^a   Kudryashov, Igor ^a   Mizuyama, Atsushi ^b   Nakamura, Kazutaka G ^b   Kondo, Ken Ichi ^b   Koshihara, Shin Ya ^c   Takesada, Masaki ^c   Matsuda, Kazunari ^c   Juodkazis, Saulius ^d,e   Jarutls, Vygandas ^d   Matsuo, Shigeki ^d   Misawa, Hiroaki ^e  

^a Tokyo Instruments Inc   (Japan)

^b TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^c KANAGAWA ACADEMY OF SCIENCE AND TECHNOLOGY   (Japan)

^d UNIVERSITY OF TOKUSHIMA   (Japan)

^e HOKKAIDO UNIVERSITY   (Japan)

Author keywords

Ablation; Femtosecond laser microfabrication; Glass and quartz dicing

Indexed keywords

IRRADIATION; LASER ABLATION; LASER BEAM EFFECTS; LASER PULSES; MICROCRACKS; MICROELECTROMECHANICAL DEVICES; MICROSTRUCTURE; PLASMAS; QUARTZ; RAYLEIGH FADING; SEMICONDUCTOR LASERS; SURFACE PROPERTIES;

CUTTING WAFERS; DILATATION WAVES; FEMTOSECOND LASER MICROFABRICATION; GLASS AND QUARTZ DICING; PHOTONIC CRYSTAL STRUCTURES;

GLASS CUTTING MACHINES;

EID: 2542433372     PISSN: 15371646     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.1668274     Document Type: Article

References (25)

1. K. M. Davis, K. Miura, N. Sugimoto, and K. Hirao, Opt. Lett. 21, 1729-1731 (1996).
2. C. B. Schaffer, A. Brodeur, J. F. Garciá, and E. Mazur, Opt. Lett. 26(2), 93-95 (2001).
3. H. Misawa, Jpn. patent application No. 023614 (1995).
4. M. Watanabe, H.-B. Sun, S. Juodkazis, T. Takahashi, S. Matsuo, Y. Suzuki, J. Nishii, and H. Misawa, Jpn. J. Appl. Phys., Part 2 27(12B), L1527-L1530 (1998).
5. H. Sun, Y. Xu, S. Juodkazis, K. Sun, M. Watanabe, S. Matsuo, H. Misawa, and J. Nishii, Opt. Lett. 26(6), 325-327 (2001).
6. M. Miwa, S. Juodkazis, T. Kawakami, S. Matsuo, and H. Misawa, Appl. Phys. A: Mater. Sci. Process. 73(5), 561-566 (2001).
7. H. Sun, V. Mizeikis, S. Juodkazis, J.-Y. Ye, S. Matsuo, and H. Misawa, Appl. Phys. Lett. 79(1), 1-3 (2001).
8. M. Watanabe, Thesis, Tokushima Univ., Japan (BSc 1996, MSc 1998).
9. A. Marcinkevicius, S. Juodkazis, M. Watanabe, M. Miwa, S. Matsuo, H. Misawa, and J. Nishii, Opt. Lett. 26(5), 277-279 (2001).
10. S. Juodkazis, A. V. Rode, E. G. Gamaly, S. Matsuo, and H. Misawa, Appl. Phys. B: Lasers Opt. 77, 361-366 (2003).
11. K. Yamasaki, S. Juodkazis, S. Matsuo, and H. Misawa, Appl. Phys. A: Mater. Sci. Process. 77, 371-373 (2003).
12. A. E. Siegman, Lasers, University Science, Mill Valley, CA (1986).
13. E. Vanagas, I. Kudryashov, D. Tuzhilin, S. Juodkazis, S. Matsuo, and H. Misawa, Appl. Phys. Lett. 82(17), 2901-2903 (2003).
14. V. Mizeikis, S. Juodkazis, J.-Y. Ye, A. V. Rode, S. Matsuo, and H. Misawa, Thin Solid Films 438-439, 445-451 (2003).
15. J. D. Mills, P. G. Kazansky, and E. Bricchi, Appl. Phys. Lett. 81(2), 196-198 (2002).
16. F. Dausinger, H. Hügel, and V. Konov, SPIE Proc, 5147, 106-115 (2003).
17. O. M. Eflmov, V. S. Popikov, and M. J. Soileau, J. Opt. Technol. 63, 120-125 (1996).
18. A. Marcinkevicius, V. Mizeikis, S. Juodkazis, S. Matsuo, and H. Misawa, Appl. Phys. A: Mater. Sci. Process. 76, 257-260 (2003).
19. S. Matsuo and H. Misawa, Rev. Sci. Instrum. 73, 2001-2013 (2002).
20. P. O'Shea, M. Kimmel, X. Gu, and R. Trebino, Opt. Lett. 26(12), 932-934 (2001).
21. E. G. Gamaly, A. V. Rode, V. T. Tikhonchuk, and B. Luther-Davies, Phys. Plasmas 9(3), 949-957 (2002).
22. E. Yablonovitch, Phys. Rev. Lett. 60(9), 795-796 (1988).
23. N. I. Koroteev and I. L. Shumai, Physics of Intense Laser Radiation, Nauka, Moscow (1991).
24. H. Kolsky, Stress Waves in Solids, Dover Phoenix Editions, Mineola, NY (2003).
25. K. F. Graff, Wave Motion in Elastic Solids, Dover, New York (1975).