Overall fab efficiency

IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop

Volumn , Issue , 1996, Pages 49-52

  Bonal, Javier ^a   Ortega, Carlos ^a   Rios, Luis ^a   Aparicio, Santiago ^a   Fernandez, Manuel ^a   Rosendo, Maria ^a   Sanchez, Alejandro ^a   Malvar, Sergio ^a  

^a NOKIA RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CONSTRAINT THEORY; EFFICIENCY; IMPROVEMENT; MAINTENANCE; MEASUREMENTS; PRODUCTIVITY;

OVERALL FAB EFFICIENCY; TOTAL PRODUCTIVE MAINTENANCE;

SEMICONDUCTOR DEVICES;

EID: 0030385137     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)