X-ray fluorescence system for thin film composition analysis during deposition

Thin Solid Films

Volumn 491, Issue 1-2, 2005, Pages 71-77

  Formica, Sarah P ^a   Lee, Susanne M ^a,b  

^a STATE UNIVERSITY OF NEW YORK   (United States)

^b Micro and Nano Structure Technologies   (United States)

Author keywords

Compositional mapping; In situ; Polycapillary optics; X ray fluorescence

Indexed keywords

CAPILLARITY; COMPOSITION; CONCENTRATION (PROCESS); EXTRAPOLATION; FLUORESCENCE; MONOLAYERS; SURFACE PHENOMENA; THIN FILMS;

COMPOSITIONAL MAPPING; IN SITU; POLYCAPILLARY OPTICS; X-RAY FLUORESCENCE;

X RAY ANALYSIS;

EID: 25144506069     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.05.023     Document Type: Article

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