Three-dimensional force sensor by novel alkaline etching technique

Sensors and Actuators, A: Physical

Volumn 123-124, Issue , 2005, Pages 620-626

  Vazsonyi E ^a   Adam M ^a   Ducs Cs ^a   Vizvary Z ^b   Toth A L ^a   Barsony I ^a  

^a RESEARCH INSTITUTE FOR TECHNICAL PHYSICS AND MATERIALS SCIENCE   (Hungary)

^b BUDAPEST UNIVERSITY OF TECHNOLOGY AND ECONOMICS   (Hungary)

Author keywords

Alkaline bulk micromachining; Force sensors; Tactile sensing

Indexed keywords

ANISOTROPY; ETCHING; ION IMPLANTATION; MICROMACHINING; PIEZOELECTRIC DEVICES; SILICA; SILICON NITRIDE;

ALKALINE BULK MICROMACHINING; FORCE SENSORS; TACTILE SENSING;

SENSORS;

EID: 24944530792     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.04.035     Document Type: Conference Paper

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