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Volumn 123-124, Issue , 2005, Pages 640-645

Etch-stop characteristics of heavily B/Ge-doped silicon epilayer in KOH and TMAH

Author keywords

Activation energy; Etch rate; Etch stop; KOH; TMAH; Wet etch

Indexed keywords

ACTIVATION ENERGY; AMMONIUM COMPOUNDS; BORON; DOPING (ADDITIVES); GERMANIUM; POTASSIUM COMPOUNDS;

EID: 24944526094     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.01.034     Document Type: Conference Paper
Times cited : (8)

References (10)
  • 1
    • 0031164183 scopus 로고    scopus 로고
    • Etch stop techniques for micromachining
    • S.D. Collins Etch stop techniques for micromachining J. Electrochem. Soc. 144 6 1997 2242 2257
    • (1997) J. Electrochem. Soc. , vol.144 , Issue.6 , pp. 2242-2257
    • Collins, S.D.1
  • 2
    • 0025519505 scopus 로고
    • Anisotropic etching of crystalline silicon in alkaline solution
    • H. Seidel, L. Csepregi, A. Heuberger, and H. Baumgartel Anisotropic etching of crystalline silicon in alkaline solution J. Electrochem. Soc. 137 11 1990 3626 3632
    • (1990) J. Electrochem. Soc. , vol.137 , Issue.11 , pp. 3626-3632
    • Seidel, H.1    Csepregi, L.2    Heuberger, A.3    Baumgartel, H.4
  • 6
    • 0031220488 scopus 로고    scopus 로고
    • Silicon cultured-neuron prosthetic devices for in vivo and in vitro studies
    • S. Tatic-Lucic, J.A. Wright, Y.-C. Tai, and J. Pine Silicon cultured-neuron prosthetic devices for in vivo and in vitro studies Sens. Actuators B 43 1-3 1997 105 109
    • (1997) Sens. Actuators B , vol.43 , Issue.1-3 , pp. 105-109
    • Tatic-Lucic, S.1    Wright, J.A.2    Tai, Y.-C.3    Pine, J.4
  • 9
    • 0041404785 scopus 로고    scopus 로고
    • Stress reduction and doping efficiency in B- and Ge-doped silicon molecular beam epitaxy film
    • H. Hirayama, T. Tatsumi, and N. Aizaki Stress reduction and doping efficiency in B- and Ge-doped silicon molecular beam epitaxy film Appl. Phys. Lett. 52 16 1998 1335 1337
    • (1998) Appl. Phys. Lett. , vol.52 , Issue.16 , pp. 1335-1337
    • Hirayama, H.1    Tatsumi, T.2    Aizaki, N.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.