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Volumn 59, Issue 27, 2005, Pages 3481-3484
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Deposition of crystalline C-N film by arc evaporation process
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Author keywords
Arc evaporation; Carbon nitride; Hard coatings
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Indexed keywords
AMORPHOUS MATERIALS;
CARBON NITRIDE;
CRYSTALLINE MATERIALS;
DEPOSITION;
GRAIN SIZE AND SHAPE;
MICROHARDNESS;
ARC EVAPORATION;
HARD COATINGS;
NANO-CRYSTALLINE;
ROOM TEMPERATURE;
THIN FILMS;
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EID: 24944508141
PISSN: 0167577X
EISSN: None
Source Type: Journal
DOI: 10.1016/j.matlet.2005.06.018 Document Type: Article |
Times cited : (4)
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References (13)
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