Damage ranges in metals after ion implantation

Surface and Coatings Technology

Volumn 83, Issue 1-3, 1996, Pages 10-14

  Friedland, E ^a   Van Der Berg, N G ^a   Hanssmann J ^b   Meyer, O ^b  

^a UNIVERSITY OF PRETORIA   (South Africa)

^b KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

Damage profiles; Ion implantation; Particle channelling

Indexed keywords

ALPHA PARTICLES; ANNEALING; ARGON; COPPER; DISLOCATIONS (CRYSTALS); MOLYBDENUM; POINT DEFECTS; SINGLE CRYSTALS; THERMAL EFFECTS;

ALPHA PARTICLE CHANNELING; BACKSCATTERING GEOMETRY;

ION IMPLANTATION;

EID: 0030242749     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/0257-8972(95)02788-2     Document Type: Article

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