Study of implantation damage ranges in metals at temperatures ranging from 5 to 300 K

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 118, Issue 1-4, 1996, Pages 29-33

  Friedland, E ^a   Van Der Berg, N G ^a   Meyer, O ^b   Kalbitzer, S ^c  

^a UNIVERSITY OF PRETORIA   (South Africa)

^b KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

^c MAX PLANCK INSTITUT FÜR KERNPHYSIK   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; BACKSCATTERING; COPPER; CRYSTAL DEFECTS; GEOMETRY; IONS; PARTICLE BEAM DYNAMICS; SILVER; SINGLE CRYSTALS;

PARTICLE CHANNELING; POINT DEFECT MIGRATION PROCESSES;

ION IMPLANTATION;

EID: 0030565129     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0168-583X(96)01187-1     Document Type: Article

References (14)

1. G. Linker, M. Gettings and O. Meyer, in: Ion Implantation in Semiconductors and other Materials, ed. B.L. Crowder (Plenum, New York, 1973) p. 465.
2. D.K. Sood and G. Dearnaley, J. Vac. Sci. Technol. 12 (1975) 463.
3. M. Vos and D.O. Boerma, Nucl. Instr. and Meth. B 15 (1986) 337.
4. E. Friedland, J.B. Malherbe, H.W. Alberts, R.E. Vorster and J.F. Prins, S. Afr. J. Phys. 9 (1986) 135.
5. E. Friedland and H.W. Alberts, Nucl. Instr. and Meth. B 33 (1988) 710.
6. E. Friedland, H. le Roux and J.B. Malherbe, Radiat. Eff. 87 (1986) 281.
7. E. Friedland, H.W. Alberts and M. Fletcher, Nucl. Instr. and Meth. B 45 (1990) 492.
8. E. Friedland and H.W. Alberts, Nucl. Instr. and Meth B 35 (1988) 244.
9. E. Friedland and M. Fletcher, Nucl. Instr. and Meth. B 64 (1992) 242.
10. J.F. Ziegler, Helium Stopping Powers and Ranges in all Elemental Matter (Pergamon, New York, 1977).
11. J.F. Ziegler, J.P. Biersack and U. Littmark, The Stopping and Range of Ions in Solids (Pergamon, New York, 1985).
12. P. Sigmund, Radiat. Eff. 1 (1969) 15.
13. R.S. Averback, T. Diaz de la Rubia and R. Benedek, Nucl. Instr. and Meth. B 33 (1988) 38.
14. O. Meyer and A. Turos, Mater. Sci. Rep. 2 (1987) 371.