A process parameters determination model by integrating artificial neural network and ant colony optimization

Journal of the Chinese Institute of Industrial Engineers

Volumn 22, Issue 4, 2005, Pages 346-354

  Su, Chwen Tzeng ^a   Wong, Jui Tsung ^a   Tsou, Shang Chun ^a  

^a NATIONAL YUNLIN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

Author keywords

Ant Colony Optimization (ACO); Artificial Neural Network (ANN); Chemical Machine Polishing (CMP); Data Mining

Indexed keywords

CHEMICAL MECHANICAL POLISHING; COMPUTER SIMULATION; DATA MINING; NEURAL NETWORKS; OPTIMIZATION; TREES (MATHEMATICS);

ANT COLONY OPTIMIZATION (ACO); DECISION TREES; PARAMETERS SELECTION; PROCESS PARAMETERS;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 24644513907     PISSN: 10170669     EISSN: 21517606     Source Type: Journal    
DOI: 10.1080/10170660509509304     Document Type: Article

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