|
Volumn 252, Issue 2, 2005, Pages 455-460
|
SiO 2 film electret with high surface potential stability
|
Author keywords
Charge storage stability; Ion implantation; Plasma treatment; Repetition charging; SiO 2 film electrets
|
Indexed keywords
AGING OF MATERIALS;
ELECTRETS;
GLASS;
SURFACE TREATMENT;
AGING TEMPERATURE;
CHARGE STORAGE STABILITY;
PLASMA SURFACE TREATMENT;
REMNANT POTENTIAL;
SILICON COMPOUNDS;
|
EID: 24644510315
PISSN: 01694332
EISSN: None
Source Type: Journal
DOI: 10.1016/j.apsusc.2005.01.025 Document Type: Article |
Times cited : (12)
|
References (11)
|