|
Volumn 61, Issue 1-3, 1997, Pages 352-355
|
Inorganic electret membrane for a silicon microphone
|
Author keywords
Electret membranes; Microphones; Silicon
|
Indexed keywords
CHEMICAL VAPOR DEPOSITION;
MICROMACHINING;
MICROPHONES;
NITRIDES;
SEMICONDUCTING SILICON;
SILICA;
STATIC ELECTRICITY;
SILICON MICROPHONES;
ELECTRETS;
|
EID: 0031165498
PISSN: 09244247
EISSN: None
Source Type: Journal
DOI: 10.1016/S0924-4247(97)80287-7 Document Type: Article |
Times cited : (15)
|
References (9)
|