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Volumn 61, Issue 1-3, 1997, Pages 352-355

Inorganic electret membrane for a silicon microphone

Author keywords

Electret membranes; Microphones; Silicon

Indexed keywords

CHEMICAL VAPOR DEPOSITION; MICROMACHINING; MICROPHONES; NITRIDES; SEMICONDUCTING SILICON; SILICA; STATIC ELECTRICITY;

EID: 0031165498     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)80287-7     Document Type: Article
Times cited : (15)

References (9)
  • 3
    • 0026105472 scopus 로고
    • Mechanism of charge storage in electron-beam or coronacharged silicon-dioxide electrets
    • P. Guenther, Mechanism of charge storage in electron-beam or coronacharged silicon-dioxide electrets, IEEE Trans. Electrical Insulation, 26 (1991) 42-48.
    • (1991) IEEE Trans. Electrical Insulation , vol.26 , pp. 42-48
    • Guenther, P.1
  • 5
    • 0030217508 scopus 로고    scopus 로고
    • Silicon-based inorganic electrets for application in micromachined devices
    • H. Amjadi and C. Thielemann, Silicon-based inorganic electrets for application in micromachined devices, IEEE Trans. Electrical Insulation, 3 (1996) 494-498.
    • (1996) IEEE Trans. Electrical Insulation , vol.3 , pp. 494-498
    • Amjadi, H.1    Thielemann, C.2
  • 8
    • 0031187616 scopus 로고    scopus 로고
    • Capacitive silicon sensors for ultrasound
    • to be published
    • C. Thielemann and G.M. Sessler, Capacitive silicon sensors for ultrasound, Acta Acustica, (1997) to be published.
    • (1997) Acta Acustica
    • Thielemann, C.1    Sessler, G.M.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.