Experimental comparison of absolute PDI and lateral shearing interferometer

Progress in Biomedical Optics and Imaging - Proceedings of SPIE

Volumn 5752, Issue III, 2005, Pages 1192-1199

  Zhu, Yucong ^a   Sugisaki, Katsumi ^a   Okada, Masashi ^a   Otaki, Katsura ^a   Liu, Zhiqian ^a   Ishii, Mikihiko ^a   Kawakami, Jun ^a   Saito, Jun ^a   Murakami, Katsuhiko ^a   Ouchi, Chidane ^a   Hasegawa, Masanobu ^a   Kato, Seima ^a   Hasegawa, Takayuki ^a   Suzuki, Akiyoshi ^a   Niibe, Masahito ^b  

^a Extreme Ultra Violet Lithography System Development Association   (Japan)

^b UNIVERSITY OF HYOGO   (Japan)

Author keywords

EUV lithography; EUV optics; Lateral shearing interferometer; Point diffraction interferometry; Wavefront measurement

Indexed keywords

CHARGE COUPLED DEVICES; DIFFRACTION; INTERFEROMETERS; LITHOGRAPHY;

EUV OPTICS; EXTREME-ULTRAVIOLET LITHOGRAPHY (EUVL); LATERAL SHEARING INTERFEROMETER (LSI); POINT DIFFRACTION INTERFEROMETRY; WAVEFRONT MEASUREMENT;

SHEARING;

EID: 24644507118     PISSN: 16057422     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.600274     Document Type: Conference Paper

References (5)

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