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Volumn 2, Issue , 2005, Pages 1664-1669

Integration of 0/1-level packaged RF-MEMS devices on MCM-D at millimeter-wave frequencies

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CONDUCTIVITY; FLIP CHIP DEVICES; FREQUENCIES; MICROELECTRODES; MILLIMETER WAVES; OPTICAL SWITCHES;

EID: 24644489304     PISSN: 05695503     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (7)

References (16)
  • 1
    • 33750602045 scopus 로고    scopus 로고
    • Optimization of 0-level packaging for RF-MEMS devices
    • Boston, MA, June, 8-12
    • A. Jourdain, X. Rottenberg, G. Carchon, and H. A. C. Tilmans, "Optimization of 0-level packaging for RF-MEMS devices," Transducers, Boston, MA, pp. 1915-1918, June, 8-12, 2003.
    • (2003) Transducers , pp. 1915-1918
    • Jourdain, A.1    Rottenberg, X.2    Carchon, G.3    Tilmans, H.A.C.4
  • 2
    • 21044459431 scopus 로고    scopus 로고
    • From zero- To second-level packaging of RF-MEMS devices
    • Miami, FL, Jan. 30 - Feb. 3
    • A. Jourdain, K. Vaesen, J. M. Scheer, J. W. Weekamp, J. T. M. van Beek, and H. Tilmans, "From zero- to second-level packaging of RF-MEMS devices," MEMS, Miami, FL, pp. 36-39, Jan. 30 - Feb. 3, 2005.
    • (2005) MEMS , pp. 36-39
    • Jourdain, A.1    Vaesen, K.2    Scheer, J.M.3    Weekamp, J.W.4    Van Beek, J.T.M.5    Tilmans, H.6
  • 4
    • 2942511587 scopus 로고    scopus 로고
    • Fabrication and accelerated hermeticity testing of an on-wafer package for RF MEMS
    • A. Margomenos and L. P. B. Katehi, "Fabrication and Accelerated Hermeticity Testing of an On-Wafer Package for RF MEMS," IEEE Transactions on Microwave Theory and Techniques, vol. 52, pp. 1626-1636, 2004.
    • (2004) IEEE Transactions on Microwave Theory and Techniques , vol.52 , pp. 1626-1636
    • Margomenos, A.1    Katehi, L.P.B.2
  • 5
    • 18844451528 scopus 로고    scopus 로고
    • DC-50 GHz low-loss wafer-scale package for RF MEMS
    • Amsterdam, The Netherlands, Oct., 11-15
    • B.-W. Min, K. Entesari, and G. M. Rebeiz, "DC-50 GHz Low-Loss Wafer-Scale Package for RF MEMS," European Microwave Conference, Amsterdam, The Netherlands, pp. 1289-1291, Oct., 11-15, 2004.
    • (2004) European Microwave Conference , pp. 1289-1291
    • Min, B.-W.1    Entesari, K.2    Rebeiz, G.M.3
  • 6
    • 18844448167 scopus 로고    scopus 로고
    • W-band RF-MEMS subsystems for smart antennas in automotive radar sensors
    • Amsterdam, The Netherlands, Oct 12-14
    • J. Schoebel, T. Buck, M. Reimann, M. Ulm, and M. Schneider, "W-Band RF-MEMS Subsystems for Smart Antennas in Automotive Radar Sensors," European Microwave Conference, Amsterdam, The Netherlands, pp. 1305-1308, Oct 12-14, 2004.
    • (2004) European Microwave Conference , pp. 1305-1308
    • Schoebel, J.1    Buck, T.2    Reimann, M.3    Ulm, M.4    Schneider, M.5
  • 7
    • 0042593140 scopus 로고    scopus 로고
    • Multi-layer thin-film MCM-D for the realization of Q-and V-band functions
    • Philadelphia, PA, June, 8-13
    • G. Carchon, S. Brebels, O. Vendier, and W. De Raedt, "Multi-layer thin-film MCM-D for the realization of Q-and V-band functions," IEEE MTT-S Digest, Philadelphia, PA, pp. 1151-1154, June, 8-13, 2003.
    • (2003) IEEE MTT-S Digest , pp. 1151-1154
    • Carchon, G.1    Brebels, S.2    Vendier, O.3    De Raedt, W.4
  • 8
    • 0002083650 scopus 로고    scopus 로고
    • Multi-layer thin film MCM-D for the integration of high-performance wireless front-end systems
    • G. Carchon, P. Pieters, K. Vaesen, W. De Raedt, B. Nauwelaers, and E. Beyne, "Multi-layer thin film MCM-D for the integration of high-performance wireless front-end systems," Microwave Journal, vol. 44, pp. 96-110, 2001.
    • (2001) Microwave Journal , vol.44 , pp. 96-110
    • Carchon, G.1    Pieters, P.2    Vaesen, K.3    De Raedt, W.4    Nauwelaers, B.5    Beyne, E.6
  • 10
    • 0035714371 scopus 로고    scopus 로고
    • Technologies for very high bandwidth electrical interconnects between next generation VLSI circuits
    • San Francisco, CA, Dec. 2-5
    • E. Beyne, "Technologies for very high bandwidth electrical interconnects between next generation VLSI circuits," International Electron Devices Meeting, San Francisco, CA, pp. 3, Dec. 2-5, 2001.
    • (2001) International Electron Devices Meeting , pp. 3
    • Beyne, E.1
  • 11
    • 28144458682 scopus 로고    scopus 로고
    • Thin-film as enabling passive integration technology for RF-SoC and SiP
    • San Francisco, CA, Feb. 6-10
    • G. Carchon, X. Sun, G. Posada, D. Linten, and E. Beyne, "Thin-Film as Enabling Passive Integration Technology for RF-SoC and SiP," ISSCC, San Francisco, CA, pp. 21.5, Feb. 6-10, 2005.
    • (2005) ISSCC
    • Carchon, G.1    Sun, X.2    Posada, G.3    Linten, D.4    Beyne, E.5
  • 13
    • 0029233436 scopus 로고
    • Reducing the effects of the mounting substrate on the performance of GaAs MMIC flip chips
    • Orlando, Florida, May, 16-20
    • R. Sturdivant, "Reducing the effects of the mounting substrate on the performance of GaAs MMIC flip chips," IEEE MTT-S Digest, Orlando, Florida, pp. 1591-1594, May, 16-20, 1995.
    • (1995) IEEE MTT-S Digest , pp. 1591-1594
    • Sturdivant, R.1
  • 14
    • 23144468005 scopus 로고    scopus 로고
    • Mechanical and electrical characterisation of BCB as a bond&seal material for cavities housing (RF)MEMS devices
    • Leuven, Belgium, Sept., 5-7
    • A. Jourdain, P. De Moor, and H. A. C. Tilmans, "Mechanical and Electrical Characterisation of BCB as a Bond&Seal Material for Cavities Housing (RF)MEMS Devices," Micromechanics Europe Workshop, Leuven, Belgium, pp. 167-170, Sept., 5-7, 2004.
    • (2004) Micromechanics Europe Workshop , pp. 167-170
    • Jourdain, A.1    De Moor, P.2    Tilmans, H.A.C.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.